LINKAGE WITH HIGH-PRECISION XY STAGE FOR MICROSCOPE

Using a high precision XY stage (150mm stroke) for microscope manufactured by Chuo Precision Industrial Co,
The system inspects individual pieces at high speed using a high-precision XY stage (150mm stroke) for microscopes manufactured by Chuo Precision Machinery Co.
Using a special imaging technique, it captures and inspects images while moving.
The maximum movement speed is 16mm/sec.
Keyence PLC KV-5000 is used for axis control.
Vibration and noise are reduced because it is not a pitch feed.
Basically, the main focus is on high-precision stages that are attached to Nikon and Olympus microscopes,
The theme of this project is the linkage of the FlexInspector with these stages.
While line sensors target "substrate inspection," microscope XY stages target "semiconductor wafer inspection,
The microscope XY stage targets "semiconductor wafer inspection" while the line sensor targets "substrate inspection".
Reference speed
Approx. 70 sec. for 340 times image capture and inspection at 2.54mm pitch
Approx. 200ms per wafer